MASS FLOW CONTROLLERS
Overview
Aiming to improve the functionality of semiconductor production equipment, Hitachi Metals has contributed to the development of the high-technology industry by commercializing high-performance precision process fluid control equipment, drawing on the fruits of its high-level R&D.
Products Catalogs (PDF file)
SAM®
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Mass Flow Controller SFC1480FX / SFC2480FX series(PDF：
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Mass Flow Controller SFC1480G / SFC2480G series(PDF：)
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Pressure-Based PI Mass Flow Controller PS100 Series(PDF：)
Aera®
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Mass Flow Controllers Aera® FC-R7700 series(PDF：)
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Mass Flow Controllers Aera® FC-R7800 series(PDF：)
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Digital Mass Flow Products Aera® FC-DR980 (PDF：)
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Digital Mass Flow Products Aera® Transformer®(PDF：)
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Pressure Insensitive (PI) Mass Flow Controller Aera® HG200Series (PDF：)
- Pressure controller EPV100 series
- Mass Flow Meter Aera® FM-R37 series
- Mass Flow Meter Aera® FM-R87 series
- Vaporizer AS series
- Refill system RS series
Inquiries
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Piping Components Business Unit
- Contact Information
